Study of oxygen vacancies motion in BST thin film

• Main Author: Wu, Ruihong.
• Other Authors: Wang Junling
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/15374
• Institution: Nanyang Technological University

Barium strontium titanate (BST) films with high dielectric constant have attracted great attention for applications in capacitors and dynamic random access memory (DRAM). To increase the reliability of the BST capacitors, it is very important to minimize leakage current to preserve information store...