Studies of wafer level electromigration test for ULSI

• 主要作者: Sum, Heng Keong.
• 其他作者: Tan, Cher Ming
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/3299
• 機構: Nanyang Technological University

Microelectronic test structures are used for wide variety of tasks which include equipment characterizations, reliability evaluations, defect monitoring, transistor parameter extraction and process verification and development. Similarly, test structures are used in electromigration evaluation. In t...