Studies of wafer level electromigration test for ULSI

• Main Author: Sum, Heng Keong.
• Other Authors: Tan, Cher Ming
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/3299
• Institution: Nanyang Technological University

Microelectronic test structures are used for wide variety of tasks which include equipment characterizations, reliability evaluations, defect monitoring, transistor parameter extraction and process verification and development. Similarly, test structures are used in electromigration evaluation. In t...