Material characterization and device design of TiNx infrared microemitter

Material characterization and device design of TiNx infrared microemitter

This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.

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書目詳細資料
主要作者:	Wang, Jun Min.
其他作者:	Mei, Ting
格式:	Theses and Dissertations
出版:	2008
主題:	DRNTU::Engineering::Electrical and electronic engineering
在線閱讀:	http://hdl.handle.net/10356/3668
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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