Fabrication and characterization of mesoporous dielectric materials for ULSI interconnect applications

• 主要作者: Yu, Suzhu
• 其他作者: Hu Xiao
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• 在線閱讀: https://hdl.handle.net/10356/3931

With the miniaturization of semiconductor devices, new dielectric materials with dielectric constant (k) lower than silicon dioxide (k = 4.0) are required to reduce propagation delay, cross talk noise and power dissipation of the interconnect system in ultra-large-scale integrated circuits (ULSI). T...