Characterization and structural modification of polysilsesquioxanes for low dielectric constant (k) applications in deep sub-micron devices

• 主要作者: Siew, Yong Kong.
• 其他作者: Sarkar, Gautam
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• 在線閱讀: http://hdl.handle.net/10356/5107
• 機構: Nanyang Technological University

A preliminary study on the thermal stability of different spin-on dielectrics (SODs) has been conducted and it is found that generally organic SODs exhibited lower thermal stability, both in terms of weight loss and the highest allowable temperature, compared to inorganic SODs. On the other hand, th...