Characterization and structural modification of polysilsesquioxanes for low dielectric constant (k) applications in deep sub-micron devices

• Main Author: Siew, Yong Kong.
• Other Authors: Sarkar, Gautam
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• Online Access: http://hdl.handle.net/10356/5107
• Institution: Nanyang Technological University

A preliminary study on the thermal stability of different spin-on dielectrics (SODs) has been conducted and it is found that generally organic SODs exhibited lower thermal stability, both in terms of weight loss and the highest allowable temperature, compared to inorganic SODs. On the other hand, th...