Process development of nanowires for off-chip interconnects

• 主要作者: Chong, Ser Choong.
• 其他作者: School of Materials Science & Engineering
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• 在線閱讀: http://hdl.handle.net/10356/5123

Nickel nanowires with solder cap are successfully fabricated on the test chip with well defined location. The location of the nanowires on the test chip can be pre-determined by using patterned silicon dioxide as the protective layer. The developed fabrication process of nanowires can be easily adap...