New observations on the correlation between hole-trapping transformation and SILC generation under NBTI stressing
New observations on the correlation between the recoverable-to-permanent transformation of hole trapping and the generation of stress-induced leakage current (SILC) under negative-bias temperature stressing are presented. Both effects are shown to exhibit very similar temperature dependence, activat...
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/86847 http://hdl.handle.net/10220/45200 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | New observations on the correlation between the recoverable-to-permanent transformation of hole trapping and the generation of stress-induced leakage current (SILC) under negative-bias temperature stressing are presented. Both effects are shown to exhibit very similar temperature dependence, activation energies, and power-law time exponents. In addition, a corner temperature (~125 °C), which marks an increase in the activation energy from the high-to-low temperature regime, is revealed in both the trapped-hole transformation and the SILC generation, further highlighting the strongly correlated behaviors of the two effects. These findings corroborate an earlier hypothesis that both phenomena share a common degradation mechanism. |
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