Evolution of surface roughness during metal silicides phase transformation

This study monitors systematically the evolution of surface roughness during metal (Ti, Co, and Ni) silicides phase transformation and coupling to other physical parameters. During metal/silicon reaction film surface roughness evolves due to the effect of nucleation and growth of metal silicides and...

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Main Authors: Pang, C. H., Hing, P., Zhao, F. F., See, A., Chong, Y. F., Lee, Pooi See
其他作者: School of Materials Science & Engineering
格式: Article
語言:English
出版: 2012
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在線閱讀:https://hdl.handle.net/10356/94996
http://hdl.handle.net/10220/8699
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