Evolution of surface roughness during metal silicides phase transformation

This study monitors systematically the evolution of surface roughness during metal (Ti, Co, and Ni) silicides phase transformation and coupling to other physical parameters. During metal/silicon reaction film surface roughness evolves due to the effect of nucleation and growth of metal silicides and...

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Bibliographic Details
Main Authors: Pang, C. H., Hing, P., Zhao, F. F., See, A., Chong, Y. F., Lee, Pooi See
Other Authors: School of Materials Science & Engineering
Format: Article
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/94996
http://hdl.handle.net/10220/8699
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Institution: Nanyang Technological University
Language: English

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