Layer-by-layer oxidation of InN(0001) thin films into body-center cubic In2O3(111) by cycle rapid thermal annealing
We report on a study of In2O3 thin films obtained by post-growth thermal oxidation of InN(0001) using rapid thermal annealing (RTA) and cycle-RTA (CRTA). The crystal qualities of both the resultant In2O3 and the remaining InN were significantly improved by using CRTA instead of RTA. Body-center cubi...
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/95618 http://hdl.handle.net/10220/10823 |
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| Institution: | Nanyang Technological University |
| Language: | English |