Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers
With many of research on Fourier transform IR (FTIR) on low-k materials, our experiments extended the FTIR spectroscopy application to characterization and analysis of the low-k dielectric thin film properties on patterned wafers. FTIR spectra on low-k materials were successfully captured under thre...
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| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/96810 http://hdl.handle.net/10220/11660 |
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| Institution: | Nanyang Technological University |
| Language: | English |