The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1)
10.1016/S0022-0248(01)00811-9
محفوظ في:
| المؤلفون الرئيسيون: | , , |
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| التنسيق: | Conference or Workshop Item |
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2014
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| الوصول للمادة أونلاين: | http://scholarbank.nus.edu.sg/handle/10635/107316 |
| الوسوم: |
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sg-nus-scholar.10635-1073162024-11-15T07:05:16Z The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) Hartell, A.D. Tok, E.S. Zhang, J. MATERIALS SCIENCE A1. Doping A1. Segregation A3. Chemical vapour deposition processes A3. Molecular beam epitaxy B2. Semiconducting silicon B2. Semiconducting silicon compounds 10.1016/S0022-0248(01)00811-9 Journal of Crystal Growth 227-228 729-734 JCRGA 2014-10-29T08:42:32Z 2014-10-29T08:42:32Z 2001-07 Conference Paper Hartell, A.D., Tok, E.S., Zhang, J. (2001-07). The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1). Journal of Crystal Growth 227-228 : 729-734. ScholarBank@NUS Repository. https://doi.org/10.1016/S0022-0248(01)00811-9 00220248 http://scholarbank.nus.edu.sg/handle/10635/107316 000169557600141 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
A1. Doping A1. Segregation A3. Chemical vapour deposition processes A3. Molecular beam epitaxy B2. Semiconducting silicon B2. Semiconducting silicon compounds |
| spellingShingle |
A1. Doping A1. Segregation A3. Chemical vapour deposition processes A3. Molecular beam epitaxy B2. Semiconducting silicon B2. Semiconducting silicon compounds Hartell, A.D. Tok, E.S. Zhang, J. The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) |
| description |
10.1016/S0022-0248(01)00811-9 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Hartell, A.D. Tok, E.S. Zhang, J. |
| format |
Conference or Workshop Item |
| author |
Hartell, A.D. Tok, E.S. Zhang, J. |
| author_sort |
Hartell, A.D. |
| title |
The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) |
| title_short |
The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) |
| title_full |
The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) |
| title_fullStr |
The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) |
| title_full_unstemmed |
The development of RAS and RHEED as in situ probes to monitor dopant segregation in GS-MBE on Si (0 0 1) |
| title_sort |
development of ras and rheed as in situ probes to monitor dopant segregation in gs-mbe on si (0 0 1) |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/107316 |
| _version_ |
1821203793590616064 |