FIB precision TEM sample preparation using carbon replica

FIB precision TEM sample preparation using carbon replica

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

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書目詳細資料
Main Authors:	Sheng, T.T., Goh, G.P., Tung, C.H., Wang, John L.F., Cheng, Jeng Kou
其他作者:	INSTITUTE OF MICROELECTRONICS
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/112977
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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