The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion
10.1117/12.405375
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/113122 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-113122 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-1131222024-11-12T21:17:33Z The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion Liu, R. Wee, A.T.S. Liu, L. Hao, G. INSTITUTE OF ENGINEERING SCIENCE PHYSICS MATERIALS SCIENCE Cu metallization Sample rotation Secondary ion mass spectrometry Ta barriers 10.1117/12.405375 Proceedings of SPIE - The International Society for Optical Engineering 4227 98-102 PSISD 2014-11-28T09:12:17Z 2014-11-28T09:12:17Z 2000 Conference Paper Liu, R., Wee, A.T.S., Liu, L., Hao, G. (2000). The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion. Proceedings of SPIE - The International Society for Optical Engineering 4227 : 98-102. ScholarBank@NUS Repository. https://doi.org/10.1117/12.405375 0277786X http://scholarbank.nus.edu.sg/handle/10635/113122 000167995300017 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Cu metallization Sample rotation Secondary ion mass spectrometry Ta barriers |
| spellingShingle |
Cu metallization Sample rotation Secondary ion mass spectrometry Ta barriers Liu, R. Wee, A.T.S. Liu, L. Hao, G. The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion |
| description |
10.1117/12.405375 |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Liu, R. Wee, A.T.S. Liu, L. Hao, G. |
| format |
Conference or Workshop Item |
| author |
Liu, R. Wee, A.T.S. Liu, L. Hao, G. |
| author_sort |
Liu, R. |
| title |
The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion |
| title_short |
The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion |
| title_full |
The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion |
| title_fullStr |
The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion |
| title_full_unstemmed |
The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion |
| title_sort |
use of sample rotation in sims profiling of ta barrier layers to cu diffusion |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113122 |
| _version_ |
1821209503698255872 |