X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy

10.1016/j.physleta.2014.12.007

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Bibliographic Details
Main Authors:	Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh
Other Authors:	SINGAPORE SYNCHROTRON LIGHT SOURCE
Format:	Article
Published:	Elsevier 2016
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/123571
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-123571
record_format	dspace
spelling	sg-nus-scholar.10635-1235712023-10-26T21:06:28Z X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy Kalaiselvi, Shenbaga M. P. Tan, Augustine Tuck Lee Talebitaher, Alireza R. Lee, Paul Heussler, Sascha Pierre Breese, Mark Brian H. Rawat, Rajdeepsingh SINGAPORE SYNCHROTRON LIGHT SOURCE PHYSICS 10.1016/j.physleta.2014.12.007 Physics Letters, Section A: General, Atomic and Solid State Physics 379 6 560-569 2016-04-29T08:30:59Z 2016-04-29T08:30:59Z 2015 Article Kalaiselvi, Shenbaga M. P., Tan, Augustine Tuck Lee, Talebitaher, Alireza R., Lee, Paul, Heussler, Sascha Pierre, Breese, Mark Brian H., Rawat, Rajdeepsingh (2015). X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy. Physics Letters, Section A: General, Atomic and Solid State Physics 379 (6) : 560-569. ScholarBank@NUS Repository. https://doi.org/10.1016/j.physleta.2014.12.007 03759601 http://scholarbank.nus.edu.sg/handle/10635/123571 000349586000009 Elsevier
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1016/j.physleta.2014.12.007
author2	SINGAPORE SYNCHROTRON LIGHT SOURCE
author_facet	SINGAPORE SYNCHROTRON LIGHT SOURCE Kalaiselvi, Shenbaga M. P. Tan, Augustine Tuck Lee Talebitaher, Alireza R. Lee, Paul Heussler, Sascha Pierre Breese, Mark Brian H. Rawat, Rajdeepsingh
format	Article
author	Kalaiselvi, Shenbaga M. P. Tan, Augustine Tuck Lee Talebitaher, Alireza R. Lee, Paul Heussler, Sascha Pierre Breese, Mark Brian H. Rawat, Rajdeepsingh
spellingShingle	Kalaiselvi, Shenbaga M. P. Tan, Augustine Tuck Lee Talebitaher, Alireza R. Lee, Paul Heussler, Sascha Pierre Breese, Mark Brian H. Rawat, Rajdeepsingh X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
author_sort	Kalaiselvi, Shenbaga M. P.
title	X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
title_short	X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
title_full	X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
title_fullStr	X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
title_full_unstemmed	X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy
title_sort	x-ray lithography of su8 photoresist using fast miniature plasma focus device and its characterization using ftir spectroscopy
publisher	Elsevier
publishDate	2016
url	http://scholarbank.nus.edu.sg/handle/10635/123571
_version_	1781789790065131520

X-ray lithography of SU8 photoresist using fast miniature plasma focus device and its characterization using FTIR spectroscopy

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