Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure

Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure

10.1038/s41598-017-01449-1

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Main Authors: Wang, W, Lei, D, Dong, Y, Gong, X, Tok, E.S, Yeo, Y.-C
Other Authors: DEPT OF ELECTRICAL & COMPUTER ENGG
Format: Article
Published: 2020
Online Access:https://scholarbank.nus.edu.sg/handle/10635/178324
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1783242023-09-06T08:52:28Z Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure Wang, W Lei, D Dong, Y Gong, X Tok, E.S Yeo, Y.-C DEPT OF ELECTRICAL & COMPUTER ENGG DEPT OF PHYSICS 10.1038/s41598-017-01449-1 Scientific Reports 7 1 1835 2020-10-20T09:13:25Z 2020-10-20T09:13:25Z 2017 Article Wang, W, Lei, D, Dong, Y, Gong, X, Tok, E.S, Yeo, Y.-C (2017). Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure. Scientific Reports 7 (1) : 1835. ScholarBank@NUS Repository. https://doi.org/10.1038/s41598-017-01449-1 20452322 https://scholarbank.nus.edu.sg/handle/10635/178324 Attribution 4.0 International http://creativecommons.org/licenses/by/4.0/ Unpaywall 20201031
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1038/s41598-017-01449-1
author2 DEPT OF ELECTRICAL & COMPUTER ENGG
author_facet DEPT OF ELECTRICAL & COMPUTER ENGG
Wang, W
Lei, D
Dong, Y
Gong, X
Tok, E.S
Yeo, Y.-C
format Article
author Wang, W
Lei, D
Dong, Y
Gong, X
Tok, E.S
Yeo, Y.-C
spellingShingle Wang, W
Lei, D
Dong, Y
Gong, X
Tok, E.S
Yeo, Y.-C
Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure
author_sort Wang, W
title Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure
title_short Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure
title_full Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure
title_fullStr Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure
title_full_unstemmed Digital etch technique for forming ultra-scaled germanium-tin (Ge 1-x Sn x) fin structure
title_sort digital etch technique for forming ultra-scaled germanium-tin (ge 1-x sn x) fin structure
publishDate 2020
url https://scholarbank.nus.edu.sg/handle/10635/178324
_version_ 1779152245298823168

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