High efficiency cathodoluminescence detector with high discrimination against backscattered electrons
US5264704
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Main Authors: | PHANG, JACOB C. H., CHAN, DANIEL S. H., PEY, KIN L. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Patent |
Published: |
2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32531 |
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Institution: | National University of Singapore |
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