Method to reduce compressive stress in the silicon substrate during silicidation
US6284610
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2012
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32598 |
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sg-nus-scholar.10635-325982015-07-29T07:03:43Z Method to reduce compressive stress in the silicon substrate during silicidation CHA, RANDALL CHER LIANG CHUA, CHEE TEE PEY, KIN LEONG CHAN, LAP ELECTRICAL & COMPUTER ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6284610 Granted Patent 2012-05-02T02:27:35Z 2012-05-02T02:27:35Z 2001-09-04 Patent CHA, RANDALL CHER LIANG,CHUA, CHEE TEE,PEY, KIN LEONG,CHAN, LAP (2001-09-04). Method to reduce compressive stress in the silicon substrate during silicidation. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32598 NOT_IN_WOS PatSnap |
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National University of Singapore |
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NUS Library |
| country |
Singapore |
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ScholarBank@NUS |
| description |
US6284610 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING CHA, RANDALL CHER LIANG CHUA, CHEE TEE PEY, KIN LEONG CHAN, LAP |
| format |
Patent |
| author |
CHA, RANDALL CHER LIANG CHUA, CHEE TEE PEY, KIN LEONG CHAN, LAP |
| spellingShingle |
CHA, RANDALL CHER LIANG CHUA, CHEE TEE PEY, KIN LEONG CHAN, LAP Method to reduce compressive stress in the silicon substrate during silicidation |
| author_sort |
CHA, RANDALL CHER LIANG |
| title |
Method to reduce compressive stress in the silicon substrate during silicidation |
| title_short |
Method to reduce compressive stress in the silicon substrate during silicidation |
| title_full |
Method to reduce compressive stress in the silicon substrate during silicidation |
| title_fullStr |
Method to reduce compressive stress in the silicon substrate during silicidation |
| title_full_unstemmed |
Method to reduce compressive stress in the silicon substrate during silicidation |
| title_sort |
method to reduce compressive stress in the silicon substrate during silicidation |
| publishDate |
2012 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/32598 |
| _version_ |
1681081252645437440 |