Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

US6391720

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Bibliographic Details
Main Authors:	SNEELAL, SNEEDHARAN PILLAI, POH, FRANCIS YOUG WEE, LEE, JAMES YONG MENG, SEE, ALEX, LAU, C. K., SAMUDRA, GANESH SHANKAR
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32609
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32609
record_format	dspace
spelling	sg-nus-scholar.10635-326092024-11-13T12:46:31Z Process flow for a performance enhanced MOSFET with self-aligned, recessed channel SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS YOUG WEE LEE, JAMES YONG MENG SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR ELECTRICAL & COMPUTER ENGINEERING PHYSICS CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US6391720 Granted Patent 2012-05-02T02:27:44Z 2012-05-02T02:27:44Z 2002-05-21 Patent SNEELAL, SNEEDHARAN PILLAI,POH, FRANCIS YOUG WEE,LEE, JAMES YONG MENG,SEE, ALEX,LAU, C. K.,SAMUDRA, GANESH SHANKAR (2002-05-21). Process flow for a performance enhanced MOSFET with self-aligned, recessed channel. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32609 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	US6391720
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS YOUG WEE LEE, JAMES YONG MENG SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR
format	Patent
author	SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS YOUG WEE LEE, JAMES YONG MENG SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR
spellingShingle	SNEELAL, SNEEDHARAN PILLAI POH, FRANCIS YOUG WEE LEE, JAMES YONG MENG SEE, ALEX LAU, C. K. SAMUDRA, GANESH SHANKAR Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
author_sort	SNEELAL, SNEEDHARAN PILLAI
title	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_short	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_full	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_fullStr	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_full_unstemmed	Process flow for a performance enhanced MOSFET with self-aligned, recessed channel
title_sort	process flow for a performance enhanced mosfet with self-aligned, recessed channel
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32609
_version_	1821199910240780288

Process flow for a performance enhanced MOSFET with self-aligned, recessed channel

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