Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants

Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants

10.1109/66.806124

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Bibliographic Details
Main Authors: Soo, C.P., Valiyaveettil, S., Huan, A., Wee, A., Ang, T.C., Fan, M.H., Bourdillon, A.J., Chan, L.H.
Other Authors: MATERIALS SCIENCE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/52913
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Institution: National University of Singapore
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Summary:10.1109/66.806124

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