Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants

10.1109/66.806124

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Bibliographic Details
Main Authors:	Soo, C.P., Valiyaveettil, S., Huan, A., Wee, A., Ang, T.C., Fan, M.H., Bourdillon, A.J., Chan, L.H.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/52913
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Institution:	National University of Singapore

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