Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants
10.1109/66.806124
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2014
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sg-nus-scholar.10635-529132015-01-11T08:26:57Z Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants Soo, C.P. Valiyaveettil, S. Huan, A. Wee, A. Ang, T.C. Fan, M.H. Bourdillon, A.J. Chan, L.H. MATERIALS SCIENCE PHYSICS CHEMISTRY 10.1109/66.806124 IEEE Transactions on Semiconductor Manufacturing 12 4 462-469 ITSME 2014-05-19T02:51:46Z 2014-05-19T02:51:46Z 1999 Article Soo, C.P.,Valiyaveettil, S.,Huan, A.,Wee, A.,Ang, T.C.,Fan, M.H.,Bourdillon, A.J.,Chan, L.H. (1999). Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants. IEEE Transactions on Semiconductor Manufacturing 12 (4) : 462-469. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/66.806124" target="_blank">https://doi.org/10.1109/66.806124</a> 08946507 http://scholarbank.nus.edu.sg/handle/10635/52913 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
10.1109/66.806124 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Soo, C.P. Valiyaveettil, S. Huan, A. Wee, A. Ang, T.C. Fan, M.H. Bourdillon, A.J. Chan, L.H. |
| format |
Article |
| author |
Soo, C.P. Valiyaveettil, S. Huan, A. Wee, A. Ang, T.C. Fan, M.H. Bourdillon, A.J. Chan, L.H. |
| spellingShingle |
Soo, C.P. Valiyaveettil, S. Huan, A. Wee, A. Ang, T.C. Fan, M.H. Bourdillon, A.J. Chan, L.H. Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| author_sort |
Soo, C.P. |
| title |
Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| title_short |
Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| title_full |
Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| title_fullStr |
Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| title_full_unstemmed |
Enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| title_sort |
enhancement or reduction of catalytic dissolution reaction in chemically amplified resists by substrate contaminants |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/52913 |
| _version_ |
1681084066133180416 |