A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance

10.1016/j.tsf.2004.05.120

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Bibliographic Details
Main Authors:	Jagar, S., Singh, N., Mehta, S.S., Agrawal, N., Samudra, G., Balasubramanian, N.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	DUV 248 nm lithography Fin patterning FinFET PSM Tri-gate MOSFET
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54148
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-54148
record_format	dspace
spelling	sg-nus-scholar.10635-541482023-10-29T21:51:09Z A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance Jagar, S. Singh, N. Mehta, S.S. Agrawal, N. Samudra, G. Balasubramanian, N. ELECTRICAL & COMPUTER ENGINEERING DUV 248 nm lithography Fin patterning FinFET PSM Tri-gate MOSFET 10.1016/j.tsf.2004.05.120 Thin Solid Films 462-463 SPEC. ISS. 1-5 THSFA 2014-06-16T09:28:00Z 2014-06-16T09:28:00Z 2004-09 Article Jagar, S., Singh, N., Mehta, S.S., Agrawal, N., Samudra, G., Balasubramanian, N. (2004-09). A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance. Thin Solid Films 462-463 (SPEC. ISS.) : 1-5. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.120 00406090 http://scholarbank.nus.edu.sg/handle/10635/54148 000223812800002 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	DUV 248 nm lithography Fin patterning FinFET PSM Tri-gate MOSFET
spellingShingle	DUV 248 nm lithography Fin patterning FinFET PSM Tri-gate MOSFET Jagar, S. Singh, N. Mehta, S.S. Agrawal, N. Samudra, G. Balasubramanian, N. A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance
description	10.1016/j.tsf.2004.05.120
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Jagar, S. Singh, N. Mehta, S.S. Agrawal, N. Samudra, G. Balasubramanian, N.
format	Article
author	Jagar, S. Singh, N. Mehta, S.S. Agrawal, N. Samudra, G. Balasubramanian, N.
author_sort	Jagar, S.
title	A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance
title_short	A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance
title_full	A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance
title_fullStr	A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance
title_full_unstemmed	A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance
title_sort	finfet and tri-gate mosfet's channel structure patterning and its influence on the device performance
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/54148
_version_	1781411942175342592

A FinFET and Tri-gate MOSFET's channel structure patterning and its influence on the device performance

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