Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range

Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range

10.1109/LED.2011.2169931

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Bibliographic Details
Main Authors: Lou, L., Park, W.-T., Zhang, S., Lim, L.S., Kwong, D.-L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Large compressive strain
Multilayered diaphragm structure
Silicon nanowire (SiNW)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55278
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Institution: National University of Singapore
Description
Summary:10.1109/LED.2011.2169931

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