Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range

10.1109/LED.2011.2169931

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Bibliographic Details
Main Authors:	Lou, L., Park, W.-T., Zhang, S., Lim, L.S., Kwong, D.-L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Large compressive strain Multilayered diaphragm structure Silicon nanowire (SiNW)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/55278
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-55278
record_format	dspace
spelling	sg-nus-scholar.10635-552782023-10-27T07:04:00Z Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range Lou, L. Park, W.-T. Zhang, S. Lim, L.S. Kwong, D.-L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Large compressive strain Multilayered diaphragm structure Silicon nanowire (SiNW) 10.1109/LED.2011.2169931 IEEE Electron Device Letters 32 12 1764-1766 EDLED 2014-06-17T02:41:15Z 2014-06-17T02:41:15Z 2011-12 Article Lou, L., Park, W.-T., Zhang, S., Lim, L.S., Kwong, D.-L., Lee, C. (2011-12). Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range. IEEE Electron Device Letters 32 (12) : 1764-1766. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2011.2169931 07413106 http://scholarbank.nus.edu.sg/handle/10635/55278 000297352500039 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Large compressive strain Multilayered diaphragm structure Silicon nanowire (SiNW)
spellingShingle	Large compressive strain Multilayered diaphragm structure Silicon nanowire (SiNW) Lou, L. Park, W.-T. Zhang, S. Lim, L.S. Kwong, D.-L. Lee, C. Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
description	10.1109/LED.2011.2169931
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lou, L. Park, W.-T. Zhang, S. Lim, L.S. Kwong, D.-L. Lee, C.
format	Article
author	Lou, L. Park, W.-T. Zhang, S. Lim, L.S. Kwong, D.-L. Lee, C.
author_sort	Lou, L.
title	Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
title_short	Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
title_full	Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
title_fullStr	Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
title_full_unstemmed	Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
title_sort	characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/55278
_version_	1781412102199574528

Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range

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