Characterization of silicon nanowire embedded in a mems diaphragm structure within large compressive strain range

• Main Authors: Lou, L., Park, W.-T., Zhang, S., Lim, L.S., Kwong, D.-L., Lee, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Large compressive strain; Multilayered diaphragm structure; Silicon nanowire (SiNW)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/55278
• Institution: National University of Singapore

10.1109/LED.2011.2169931