Mechanics of catalyst motion during metal assisted chemical etching of silicon
10.1021/jp407561k
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Main Authors: | Lai, C.Q., Cheng, H., Choi, W.K., Thompson, C.V. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/56598 |
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Institution: | National University of Singapore |
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