Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers

10.1149/1.2437070

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Bibliographic Details
Main Authors:	Lim, A.E.-J., Hwang, W.S., Wang, X.P., Lai, D.M.Y., Samudra, G.S., Kwong, D.-L., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56609
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-56609
record_format	dspace
spelling	sg-nus-scholar.10635-566092023-10-30T22:03:48Z Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers Lim, A.E.-J. Hwang, W.S. Wang, X.P. Lai, D.M.Y. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/1.2437070 Journal of the Electrochemical Society 154 4 H309-H313 JESOA 2014-06-17T02:56:32Z 2014-06-17T02:56:32Z 2007 Article Lim, A.E.-J., Hwang, W.S., Wang, X.P., Lai, D.M.Y., Samudra, G.S., Kwong, D.-L., Yeo, Y.-C. (2007). Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers. Journal of the Electrochemical Society 154 (4) : H309-H313. ScholarBank@NUS Repository. https://doi.org/10.1149/1.2437070 00134651 http://scholarbank.nus.edu.sg/handle/10635/56609 000244792200067 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.2437070
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lim, A.E.-J. Hwang, W.S. Wang, X.P. Lai, D.M.Y. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C.
format	Article
author	Lim, A.E.-J. Hwang, W.S. Wang, X.P. Lai, D.M.Y. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C.
spellingShingle	Lim, A.E.-J. Hwang, W.S. Wang, X.P. Lai, D.M.Y. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C. Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
author_sort	Lim, A.E.-J.
title	Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
title_short	Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
title_full	Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
title_fullStr	Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
title_full_unstemmed	Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
title_sort	metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/56609
_version_	1781781215541460992

Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers

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