Metal-gate work function modulation using hafnium alloys obtained by the interdiffusion of thin metallic layers

• Main Authors: Lim, A.E.-J., Hwang, W.S., Wang, X.P., Lai, D.M.Y., Samudra, G.S., Kwong, D.-L., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/56609
• Institution: National University of Singapore

10.1149/1.2437070