Performance-based optical proximity correction methodology

Performance-based optical proximity correction methodology

10.1109/TCAD.2009.2032360

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書目詳細資料
Main Authors:	Teh, S.-H., Heng, C.-H., Tay, A.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Article
出版:	2014
主題:	Circuit performance Device performance Lithography Mask design Optical proximity correction (OPC)
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/57041
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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