Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors

10.1063/1.3000481

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Main Authors:	Madan, A., Samudra, G., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57523
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57523
record_format	dspace
spelling	sg-nus-scholar.10635-575232023-10-30T21:11:54Z Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors Madan, A. Samudra, G. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.3000481 Journal of Applied Physics 104 8 - JAPIA 2014-06-17T03:07:09Z 2014-06-17T03:07:09Z 2008 Article Madan, A., Samudra, G., Yeo, Y.-C. (2008). Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors. Journal of Applied Physics 104 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3000481 00218979 http://scholarbank.nus.edu.sg/handle/10635/57523 000260572100112 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3000481
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Madan, A. Samudra, G. Yeo, Y.-C.
format	Article
author	Madan, A. Samudra, G. Yeo, Y.-C.
spellingShingle	Madan, A. Samudra, G. Yeo, Y.-C. Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
author_sort	Madan, A.
title	Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
title_short	Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
title_full	Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
title_fullStr	Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
title_full_unstemmed	Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
title_sort	strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57523
_version_	1781781428034338816

Strain optimization in ultrathin body transistors with silicon-germanium source and drain stressors

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