Study of leakage mechanisms of the copper/Black Diamond™ damascene process

10.1016/j.tsf.2004.05.051

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Bibliographic Details
Main Authors:	Yiang, K.Y., Guo, Q., Yoo, W.J., Krishnamoorthy, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Conduction mechanisms Interconnects Low-k
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/57538
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-57538
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spelling	sg-nus-scholar.10635-575382023-10-30T21:52:25Z Study of leakage mechanisms of the copper/Black Diamond™ damascene process Yiang, K.Y. Guo, Q. Yoo, W.J. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING Conduction mechanisms Interconnects Low-k 10.1016/j.tsf.2004.05.051 Thin Solid Films 462-463 SPEC. ISS. 330-333 THSFA 2014-06-17T03:07:19Z 2014-06-17T03:07:19Z 2004-09 Article Yiang, K.Y., Guo, Q., Yoo, W.J., Krishnamoorthy, A. (2004-09). Study of leakage mechanisms of the copper/Black Diamond™ damascene process. Thin Solid Films 462-463 (SPEC. ISS.) : 330-333. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.051 00406090 http://scholarbank.nus.edu.sg/handle/10635/57538 000223812800068 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Conduction mechanisms Interconnects Low-k
spellingShingle	Conduction mechanisms Interconnects Low-k Yiang, K.Y. Guo, Q. Yoo, W.J. Krishnamoorthy, A. Study of leakage mechanisms of the copper/Black Diamond™ damascene process
description	10.1016/j.tsf.2004.05.051
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yiang, K.Y. Guo, Q. Yoo, W.J. Krishnamoorthy, A.
format	Article
author	Yiang, K.Y. Guo, Q. Yoo, W.J. Krishnamoorthy, A.
author_sort	Yiang, K.Y.
title	Study of leakage mechanisms of the copper/Black Diamond™ damascene process
title_short	Study of leakage mechanisms of the copper/Black Diamond™ damascene process
title_full	Study of leakage mechanisms of the copper/Black Diamond™ damascene process
title_fullStr	Study of leakage mechanisms of the copper/Black Diamond™ damascene process
title_full_unstemmed	Study of leakage mechanisms of the copper/Black Diamond™ damascene process
title_sort	study of leakage mechanisms of the copper/black diamond™ damascene process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/57538
_version_	1781781430921068544

Study of leakage mechanisms of the copper/Black Diamond™ damascene process

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