Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate

10.1063/1.2402943

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Bibliographic Details
Main Authors: Yu, H.P., Pey, K.L., Choi, W.K., Antoniadis, D.A., Fitzgerald, E.A., Chi, D.Z., Tung, C.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/57826
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-578262023-10-25T23:34:21Z Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate Yu, H.P. Pey, K.L. Choi, W.K. Antoniadis, D.A. Fitzgerald, E.A. Chi, D.Z. Tung, C.H. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.2402943 Applied Physics Letters 89 23 - APPLA 2014-06-17T03:10:37Z 2014-06-17T03:10:37Z 2006 Article Yu, H.P., Pey, K.L., Choi, W.K., Antoniadis, D.A., Fitzgerald, E.A., Chi, D.Z., Tung, C.H. (2006). Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate. Applied Physics Letters 89 (23) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2402943 00036951 http://scholarbank.nus.edu.sg/handle/10635/57826 000242709200138 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2402943
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yu, H.P.
Pey, K.L.
Choi, W.K.
Antoniadis, D.A.
Fitzgerald, E.A.
Chi, D.Z.
Tung, C.H.
format Article
author Yu, H.P.
Pey, K.L.
Choi, W.K.
Antoniadis, D.A.
Fitzgerald, E.A.
Chi, D.Z.
Tung, C.H.
spellingShingle Yu, H.P.
Pey, K.L.
Choi, W.K.
Antoniadis, D.A.
Fitzgerald, E.A.
Chi, D.Z.
Tung, C.H.
Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
author_sort Yu, H.P.
title Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
title_short Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
title_full Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
title_fullStr Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
title_full_unstemmed Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
title_sort work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/57826
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