Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon
10.1016/j.ijmachtools.2006.05.006
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2014
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sg-nus-scholar.10635-598132024-11-13T23:27:53Z Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon Cai, M.B. Li, X.P. Rahman, M. Tay, A.A.O. MECHANICAL ENGINEERING Crack Molecular dynamics Nanoscale cutting Silicon wafer 10.1016/j.ijmachtools.2006.05.006 International Journal of Machine Tools and Manufacture 47 3-4 562-569 IMTME 2014-06-17T06:15:54Z 2014-06-17T06:15:54Z 2007-03 Article Cai, M.B., Li, X.P., Rahman, M., Tay, A.A.O. (2007-03). Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon. International Journal of Machine Tools and Manufacture 47 (3-4) : 562-569. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2006.05.006 08906955 http://scholarbank.nus.edu.sg/handle/10635/59813 000243990500016 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Crack Molecular dynamics Nanoscale cutting Silicon wafer |
| spellingShingle |
Crack Molecular dynamics Nanoscale cutting Silicon wafer Cai, M.B. Li, X.P. Rahman, M. Tay, A.A.O. Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| description |
10.1016/j.ijmachtools.2006.05.006 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Cai, M.B. Li, X.P. Rahman, M. Tay, A.A.O. |
| format |
Article |
| author |
Cai, M.B. Li, X.P. Rahman, M. Tay, A.A.O. |
| author_sort |
Cai, M.B. |
| title |
Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| title_short |
Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| title_full |
Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| title_fullStr |
Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| title_full_unstemmed |
Crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| title_sort |
crack initiation in relation to the tool edge radius and cutting conditions in nanoscale cutting of silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/59813 |
| _version_ |
1821204317266247680 |