Design and performance of a new spectroscopic photon emission microscope system for the physical analysis of semiconductor devices
Review of Scientific Instruments
Saved in:
Main Authors: | Chan, D.S.H., Phang, J.C.H., Chim, W.K., Liu, Y.Y., Tao, J.M. |
---|---|
Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/62004 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
New spectroscopic photon emission microscope system for semiconductor device analysis
by: Liu, Y.Y., et al.
Published: (2014) -
New spectroscopic photon emission microscope system for semiconductor device analysis
by: Liu, Y.Y., et al.
Published: (2014) -
Analysis and quantification of device spectral signatures observed using a spectroscopic photon emission microscope
by: Tao, J.M., et al.
Published: (2014) -
High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability
by: Tao, J.M., et al.
Published: (2014) -
High-sensitivity photon emission microscope system with continuous wavelength spectroscopic capability
by: Tao, J.M., et al.
Published: (2014)