Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors

Electronics Letters

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Main Authors:	Ling, C.H., Ooi, J.A., Ang, D.S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	MOS capacitors Tunnelling
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62103
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62103
record_format	dspace
spelling	sg-nus-scholar.10635-621032015-01-13T20:51:27Z Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors Ling, C.H. Ooi, J.A. Ang, D.S. ELECTRICAL ENGINEERING MOS capacitors Tunnelling Electronics Letters 32 10 933-934 ELLEA 2014-06-17T06:47:26Z 2014-06-17T06:47:26Z 1996 Article Ling, C.H.,Ooi, J.A.,Ang, D.S. (1996). Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors. Electronics Letters 32 (10) : 933-934. ScholarBank@NUS Repository. 00135194 http://scholarbank.nus.edu.sg/handle/10635/62103 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	MOS capacitors Tunnelling
spellingShingle	MOS capacitors Tunnelling Ling, C.H. Ooi, J.A. Ang, D.S. Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
description	Electronics Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ling, C.H. Ooi, J.A. Ang, D.S.
format	Article
author	Ling, C.H. Ooi, J.A. Ang, D.S.
author_sort	Ling, C.H.
title	Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
title_short	Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
title_full	Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
title_fullStr	Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
title_full_unstemmed	Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
title_sort	effects of tungsten silicidation on fowler-nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62103
_version_	1681085714672910336

Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors

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