Effects of tungsten silicidation on Fowler-Nordheim tunnelling current and charge trapping in polysilicon-oxide-silicon capacitors
Electronics Letters
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Main Authors: | Ling, C.H., Ooi, J.A., Ang, D.S. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/62103 |
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Institution: | National University of Singapore |
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