New developments in beam induced current methods for the failure analysis of VLSI circuits

New developments in beam induced current methods for the failure analysis of VLSI circuits

Microelectronic Engineering

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Bibliographic Details
Main Authors: Chan, D.S.H., Phang, J.C.H., Lau, W.S., Ong, V.K.S., Sane, V., Kolachina, S., Osipowicz, T., Watt, F.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62473
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Institution: National University of Singapore
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Summary:Microelectronic Engineering

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