New developments in beam induced current methods for the failure analysis of VLSI circuits

Microelectronic Engineering

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Bibliographic Details
Main Authors:	Chan, D.S.H., Phang, J.C.H., Lau, W.S., Ong, V.K.S., Sane, V., Kolachina, S., Osipowicz, T., Watt, F.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62473
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-624732015-01-16T12:16:38Z New developments in beam induced current methods for the failure analysis of VLSI circuits Chan, D.S.H. Phang, J.C.H. Lau, W.S. Ong, V.K.S. Sane, V. Kolachina, S. Osipowicz, T. Watt, F. ELECTRICAL ENGINEERING PHYSICS Microelectronic Engineering 31 1-4 57-67 MIENE 2014-06-17T06:51:25Z 2014-06-17T06:51:25Z 1996-02 Article Chan, D.S.H.,Phang, J.C.H.,Lau, W.S.,Ong, V.K.S.,Sane, V.,Kolachina, S.,Osipowicz, T.,Watt, F. (1996-02). New developments in beam induced current methods for the failure analysis of VLSI circuits. Microelectronic Engineering 31 (1-4) : 57-67. ScholarBank@NUS Repository. 01679317 http://scholarbank.nus.edu.sg/handle/10635/62473 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Microelectronic Engineering
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Chan, D.S.H. Phang, J.C.H. Lau, W.S. Ong, V.K.S. Sane, V. Kolachina, S. Osipowicz, T. Watt, F.
format	Article
author	Chan, D.S.H. Phang, J.C.H. Lau, W.S. Ong, V.K.S. Sane, V. Kolachina, S. Osipowicz, T. Watt, F.
spellingShingle	Chan, D.S.H. Phang, J.C.H. Lau, W.S. Ong, V.K.S. Sane, V. Kolachina, S. Osipowicz, T. Watt, F. New developments in beam induced current methods for the failure analysis of VLSI circuits
author_sort	Chan, D.S.H.
title	New developments in beam induced current methods for the failure analysis of VLSI circuits
title_short	New developments in beam induced current methods for the failure analysis of VLSI circuits
title_full	New developments in beam induced current methods for the failure analysis of VLSI circuits
title_fullStr	New developments in beam induced current methods for the failure analysis of VLSI circuits
title_full_unstemmed	New developments in beam induced current methods for the failure analysis of VLSI circuits
title_sort	new developments in beam induced current methods for the failure analysis of vlsi circuits
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62473
_version_	1681085782177087488

New developments in beam induced current methods for the failure analysis of VLSI circuits

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