New developments in beam induced current methods for the failure analysis of VLSI circuits

• Main Authors: Chan, D.S.H., Phang, J.C.H., Lau, W.S., Ong, V.K.S., Sane, V., Kolachina, S., Osipowicz, T., Watt, F.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/62473
• Institution: National University of Singapore

Microelectronic Engineering