Design, fabrication, and assembly of an optical biosensor probe package for OCT (optical coherence tomography) application

• Main Authors: Premachandran, C.S., Khairyanto, A., Sheng, K.C.W., Singh, J., Teo, J., Yingshun, X., Nanguang, C., Sheppard, C., Olivo, M.
• Other Authors: BIOENGINEERING
• Format: Article
• Published: 2014
• Subjects: 3-D MEMS; Biomedical optical imaging; Biosensor; MEMS packaging; Micro-electro-mechanical system (MEMS); Micromirror; Mirrors; Optical coherence tomography (OCT); Optical device fabrication; Optical imaging; Optical probe; Optical scattering; Probes; Silicon; Silicon optical bench (SiOB)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/66996
• Institution: National University of Singapore

10.1109/TADVP.2009.2013658