Large rotation angle micromirror based on hypocycloidal electrothermal actuators
10.1049/el.2010.0493
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Main Authors: | Xu, Y., Singh, J., Chen, N. |
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Other Authors: | BIOENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/67135 |
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Institution: | National University of Singapore |
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