Characterization of MOS Devices by Scanning Thermal Microscopy (SThM)

• Main Authors: Lee, T.H., Fiege, G.B.M., Altes, A., Zimmermann, G., Ng, V., Heiderhoff, R., Phang, J.C.H., Balk, L.J.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/69588
• Institution: National University of Singapore

Conference Proceedings from the International Symposium for Testing and Failure Analysis