Impact of buried capping layer on TDDB physics of advanced interconnects

Impact of buried capping layer on TDDB physics of advanced interconnects

IEEE International Reliability Physics Symposium Proceedings

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Bibliographic Details
Main Authors: Yiang, K.Y., Yoo, W.J., Krishnamoorthy, A., Tang, L.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Buried capping layer
Interconnects
Low-k
Reliability
Time-dependent dielectric breakdown
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70533
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Institution: National University of Singapore
id sg-nus-scholar.10635-70533
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spelling sg-nus-scholar.10635-705332015-01-10T05:38:25Z Impact of buried capping layer on TDDB physics of advanced interconnects Yiang, K.Y. Yoo, W.J. Krishnamoorthy, A. Tang, L.J. ELECTRICAL & COMPUTER ENGINEERING Buried capping layer Interconnects Low-k Reliability Time-dependent dielectric breakdown IEEE International Reliability Physics Symposium Proceedings 490-494 2014-06-19T03:13:14Z 2014-06-19T03:13:14Z 2005 Conference Paper Yiang, K.Y.,Yoo, W.J.,Krishnamoorthy, A.,Tang, L.J. (2005). Impact of buried capping layer on TDDB physics of advanced interconnects. IEEE International Reliability Physics Symposium Proceedings : 490-494. ScholarBank@NUS Repository. 0780388038 15417026 http://scholarbank.nus.edu.sg/handle/10635/70533 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Buried capping layer
Interconnects
Low-k
Reliability
Time-dependent dielectric breakdown
spellingShingle Buried capping layer
Interconnects
Low-k
Reliability
Time-dependent dielectric breakdown
Yiang, K.Y.
Yoo, W.J.
Krishnamoorthy, A.
Tang, L.J.
Impact of buried capping layer on TDDB physics of advanced interconnects
description IEEE International Reliability Physics Symposium Proceedings
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yiang, K.Y.
Yoo, W.J.
Krishnamoorthy, A.
Tang, L.J.
format Conference or Workshop Item
author Yiang, K.Y.
Yoo, W.J.
Krishnamoorthy, A.
Tang, L.J.
author_sort Yiang, K.Y.
title Impact of buried capping layer on TDDB physics of advanced interconnects
title_short Impact of buried capping layer on TDDB physics of advanced interconnects
title_full Impact of buried capping layer on TDDB physics of advanced interconnects
title_fullStr Impact of buried capping layer on TDDB physics of advanced interconnects
title_full_unstemmed Impact of buried capping layer on TDDB physics of advanced interconnects
title_sort impact of buried capping layer on tddb physics of advanced interconnects
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70533
_version_ 1681087217225695232

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