Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization

Materials Research Society Symposium - Proceedings

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Main Authors:	Poon, D., Cho, B.J., Lu, Y.F., Tan, L.S., Bhat, M., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71512
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71512
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spelling	sg-nus-scholar.10635-715122015-05-08T18:16:42Z Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization Poon, D. Cho, B.J. Lu, Y.F. Tan, L.S. Bhat, M. See, A. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 765 229-234 MRSPD 2014-06-19T03:24:34Z 2014-06-19T03:24:34Z 2003 Conference Paper Poon, D.,Cho, B.J.,Lu, Y.F.,Tan, L.S.,Bhat, M.,See, A. (2003). Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization. Materials Research Society Symposium - Proceedings 765 : 229-234. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/71512 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Poon, D. Cho, B.J. Lu, Y.F. Tan, L.S. Bhat, M. See, A.
format	Conference or Workshop Item
author	Poon, D. Cho, B.J. Lu, Y.F. Tan, L.S. Bhat, M. See, A.
spellingShingle	Poon, D. Cho, B.J. Lu, Y.F. Tan, L.S. Bhat, M. See, A. Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
author_sort	Poon, D.
title	Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
title_short	Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
title_full	Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
title_fullStr	Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
title_full_unstemmed	Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
title_sort	process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71512
_version_	1681087396983078912

Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization

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