Process optimization for multiple-pulses laser annealing for boron implanted silicon with germanium pre-amorphization

• Main Authors: Poon, D., Cho, B.J., Lu, Y.F., Tan, L.S., Bhat, M., See, A.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71512
• Institution: National University of Singapore

Materials Research Society Symposium - Proceedings