Real-time control of photoresist development process

10.1117/12.599630

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Bibliographic Details
Main Authors:	Tay, A., Ho, W.-K., Kiew, C.-M., Zhou, Y., Lee, J.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Photoresist development Photoresist processing Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71562
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71562
record_format	dspace
spelling	sg-nus-scholar.10635-715622024-11-14T02:31:59Z Real-time control of photoresist development process Tay, A. Ho, W.-K. Kiew, C.-M. Zhou, Y. Lee, J.H. ELECTRICAL & COMPUTER ENGINEERING Photoresist development Photoresist processing Temperature control 10.1117/12.599630 Proceedings of SPIE - The International Society for Optical Engineering 5755 244-250 PSISD 2014-06-19T03:25:07Z 2014-06-19T03:25:07Z 2005 Conference Paper Tay, A., Ho, W.-K., Kiew, C.-M., Zhou, Y., Lee, J.H. (2005). Real-time control of photoresist development process. Proceedings of SPIE - The International Society for Optical Engineering 5755 : 244-250. ScholarBank@NUS Repository. https://doi.org/10.1117/12.599630 0277786X http://scholarbank.nus.edu.sg/handle/10635/71562 000230402000028 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Photoresist development Photoresist processing Temperature control
spellingShingle	Photoresist development Photoresist processing Temperature control Tay, A. Ho, W.-K. Kiew, C.-M. Zhou, Y. Lee, J.H. Real-time control of photoresist development process
description	10.1117/12.599630
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.-K. Kiew, C.-M. Zhou, Y. Lee, J.H.
format	Conference or Workshop Item
author	Tay, A. Ho, W.-K. Kiew, C.-M. Zhou, Y. Lee, J.H.
author_sort	Tay, A.
title	Real-time control of photoresist development process
title_short	Real-time control of photoresist development process
title_full	Real-time control of photoresist development process
title_fullStr	Real-time control of photoresist development process
title_full_unstemmed	Real-time control of photoresist development process
title_sort	real-time control of photoresist development process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71562
_version_	1821186128493936640

Real-time control of photoresist development process

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