Real-time control of photoresist development process
10.1117/12.599630
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Main Authors: | Tay, A., Ho, W.-K., Kiew, C.-M., Zhou, Y., Lee, J.H. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/71562 |
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Institution: | National University of Singapore |
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